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Versum will feature ION-X, a new line of products from NuMat for safe storage and delivery of sub-atmospheric dopants.
March 9, 2018
By: DAVID SAVASTANO
Versum Materials, Inc. will showcase its next-generation CMP slurries, formulated cleans and etching products, ultra-thin dielectric and metal film precursors, and delivery systems at the world’s largest semiconductor tradeshow, SEMICON China. The event takes place March 14-16, 2018 at the Shanghai New International Expo Center in Shanghai, China.  Versum will feature ION-X, a new line of products developed by NuMat Technologies for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at sub-atmospheric pressures.  Versum will also showcase its CHEMGUARD Chemical Delivery System. Its CHEMGUARD Gen III 100-400NT models are automated, dual-reservoir cabinets (DTLR) designed for 100% uptime, to meet the demanding needs of today’s semiconductor manufacturing fabs. More than 200 chemistries have undergone detailed hazards reviews and approved for the CHEMGUARD system.  “SEMICON China provides an ideal opportunity to learn more about how Versum’s expertise and passion impact the China semiconductor industry,” stated Guillermo Novo, CEO of Versum Materials, Inc.
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